Airborne Molecular Contamination in Cleanrooms

Continuously Monitor AMCs

Airborne Molecular Contamination (AMC) can cause detrimental effects, both physically and electronically, during the production and processing of many sensitive products such as semiconductors, PCBs, and optics. AMC may result from off-gassing of volatiles or direct contact with any material. Batch testing of the air does not provide enough control or resolution to solve the problems as they occur.

AMETEK MOCON offers analyzers to continuously monitor for AMC in cleanroom applications. Common analyses include methane and non-methane hydrocarbons using the Baseline 9000, total volatile organic compounds via photoionization using piD-TECH or the Baseline 9100 GC and detection of various cleanroom solvents using the Baseline 9100 GC. Acetone, IPA, sulfurs, ethanol, and aromatic hydrocarbons such as BTEX are also easily detected and reported.

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